Defect-induced bandgap narrowing in low-k dielectrics
نویسندگان
چکیده
Articles you may be interested in Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics Appl. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. Influence of electron-beam and ultraviolet treatments on low-k porous dielectrics
منابع مشابه
Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics
Articles you may be interested in Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics Appl. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials Effect of vacuum ultraviolet and ...
متن کاملLETTERS Effect of vacuum ultraviolet and ultraviolet irradiation on mobile charges in the bandgap of low-k-porous organosilicate dielectrics
Capacitance-voltage C-V measurements are used to determine the effect of vacuum ultraviolet VUV and ultraviolet irradiation on mobile charges in porous low-k organosilicate SiCOH dielectrics. Hysteresis in the C-V characteristics shows that VUV irradiation increases the number of mobile charges in the dielectric. This is because VUV photons excite the trapped electrons from defect states to mak...
متن کاملEffect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics
Articles you may be interested in Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass J. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. Characteristics of ultra low-k nanoporous and fluorinated silica based films prepared by plasma enhanced chemical vapor deposition Plasma...
متن کاملEffects of vacuum-ultraviolet irradiation on copper penetration into low-k dielectrics under bias-temperature stress
Articles you may be interested in Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics Appl. Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass J. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. The effects of plasma expos...
متن کاملMeasurements of Schottky barrier at the low-k SiOC:H/Cu interface using vacuum ultraviolet photoemission spectroscopy
Articles you may be interested in Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics Appl. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. The mechanism of low-k SiOCH film modification by oxygen atoms
متن کامل